Materials and Technologies for Semiconductors

Drawing on decades of experience in primary materials, we develop unique value-added capabilities for semiconductor manufacturing through our global Centre of Excellence network.


New materials and corrosive gas technology

Aligned with the International Technology Roadmap for Semiconductors (ITRS), past and recent developments at our San Marcos (US) facility include ultra-pure tungsten hexafluoride (WF₆) and novel precursors for high-k ALD processes. 


Rare and halogen gases

Enabling developments in deep ultraviolet (DUV) lithography, our Alpha (US) plant has pioneered high-purity halogen gas mixtures for 248nm and 193nm excimer lasers. Additional areas of expertise include xenon recycling and isotopically enriched gases and chemicals.

 
Fluorine technology for clean chamber cleaning

Our Inju (Korea) facility is pioneering the latest generation of low-cost, modular fluorine generators. This zero-carbon technology is growing in importance as the industry faces increasingly stringent environmental legislation.

We are also involved in joint development programmes with major customers, OEMs, academic bodies and industry consortia.

 
Full spectrum

We offer the full range of gases to support all semiconductor manufacturing processes:

• Ultra-pure bulk gases 

• On-Site gas generators 

• Electronic special gases in cylinder and bulk supply.

AUECC, a Linde Group company, specialises in the manufacture and distribution of ultra-pure wet chemicals for the global microelectronics industry. Discover more.

 
Systems and service expertise

In addition, we offer a wide range of professional services to allow you to focus on your core business and keep operations up and running. These extend from turnkey design and installation services to end-to-end management of your gas systems and include:

• Bulk gas storage and distribution systems 

• Bulk special gas systems (BSGS) 

• Gas cabinets and gas distribution manifolds 

• Total gas & chemical management.